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Nanoparticle Report

Silicon Nanoparticle 
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Element 1: Silicon
Structure: Crystalline
PPMD: 59  nm
Added to NIL: 8/16/2005 9:01:00 AM
Contributor: Stephen   A   Campbell  ,   University of Minnesota 

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Research Abstract:
Researchers at the University of Minnesota have developed new techniques for producing, localizing, and integrating into transistor-like structures, single crystal cubes of silicon that are tens of nanometers on a side. Until this development, integrated circuits have been built using a single layer of transistors on the surface of a single crystal wafer. This only allows one to build semiconductor materials on the same substrate. This new development points toward the possibility of a variety of new technologies including 3D integrated circuits, integrated high-performance opto, magneto and electronic devices on the same chip, and the formation of high performance devices on large area and low cost substrates.  less info

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“Synthesis of highly oriented, single-crystal silicon nanoparticles in a low-pressure, inductively coupled plasma,” Ameya Bapat, Christopher R. Perrey, Stephen A. Campbell, C. Barry Carter, and Uwe Kortshagen, J. Appl. Phys. 94, 1969-1974 (2003). 

Related Publications:
S. A. Campbell, The Science and Technology of Microelectronic Fabrication, Oxford, 1996. "A Critical Review - The Epitaxial Growth of Semiconductors By Rapid Thermal Chemical Vapor Deposition" accepted for publication, Materials Research Reviews. "Particle Beam Mass Spectrometer Measurements of Particle Formation During LPCVD of Polysilicon and SiO2 Films", P. H. McMurry, S. Nijhawan, N. Rao, P. Ziemann, S. A. Campbell, and D. B. Kittleson, submitted to J. Vac. Sci. and Techn. "Structural and more info
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